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首页 > 论文 > 光学学报 > 39卷 > 06期(pp:0623002)

相对角差法重建大口径平面光学元件面形

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
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摘要

针对已有的相对角差法面形检测原理验证装置,提出了更具鲁棒性的最小二乘积分面形重建算法。利用相对角差改写了经典最小二乘积分技术的代价函数,空间复杂?#32676;?#26102;间复杂?#28909;?#20998;别为O(N2)和O(N3)。仿真模拟表明本文算法鲁棒性显著优于Zernike波前重建法与基于样条的最小二乘积分法(SLI)。实验证明?#30431;?#27861;可适用于大口径角差法面形检测。

Newport宣传-MKS新实验室计划
补充资料

DOI:10.3788/aos201939.0623002

作者单位:

    西南科技大学计算机学院
    西南科技大学 计算机科学与技术学院
    西南科技大学计算机学院
    中国工程物理研究院应用电子学研究所

引用该论文

巫玲,陈念年,范勇,叶?#27426;? 相对角差法重建大口径平面光学元件面形[J].光学学报,2019,39(06):0623002.

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